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Proceedings Article

Effects Of The Optical Transfer Function In Surface Profile Measurements

[+] Author Affiliations
E. L. Church

USA ARDEC (United States)

P. Z. Takacs

Brookhaven National Laboratory (United States)

Proc. SPIE 1164, Surface Characterization and Testing II, 46 (December 20, 1989); doi:10.1117/12.962806
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From Conference Volume 1164

  • Surface Characterization and Testing II
  • John E. Greivenkamp; Matthew Young
  • San Diego | August 07, 1989

abstract

The effects of the measurement transfer function in a Wyko-like profiling microscope have been explored analytically, and large attenuations found over the upper half Hof the optical bandpass. In the case of corrugated surfaces these effects can be eliminated using a universal inverse-filtering routine. In the case of isotropically-rough surfaces the effects are larger, and although restoration is possible, no universal filter exists.

© (1989) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

E. L. Church and P. Z. Takacs
"Effects Of The Optical Transfer Function In Surface Profile Measurements", Proc. SPIE 1164, Surface Characterization and Testing II, 46 (December 20, 1989); doi:10.1117/12.962806; http://dx.doi.org/10.1117/12.962806


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