Application of DMD: laser speckle control for rough surface photofabrication

Vincent Brissonneau; Ludovic Escoubas; François Flory; Gérard Berginc

doi:10.1117/12.905856

13 February 2012 Application of DMD: laser speckle control for rough surface photofabrication

Vincent Brissonneau, Ludovic Escoubas, François Flory, Gérard Berginc

Proceedings Volume 8254, Emerging Digital Micromirror Device Based Systems and Applications IV; 82540N (2012) https://doi.org/10.1117/12.905856
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Digital Micromirror Devices are mainly known for display in video projectors. More and more, they are used in industrial or research applications. DMD is a versatile tool for lithography allowing photoresist exposure with easy-changing masking step in direct-patterning. Any application where light shaping is necessary can be considered by using DMD. We here show photofabrication of random rough surfaces using an indirect modified beam exposure. A laser beam is enlarged and scattered by a diffusing element. The scattering from this diffusing surface allows the creation of a speckle pattern with a random light distribution. The intensity is then recorded on a photoresist coated substrate. The patterned photoresist is next developed and an etching step enables the transfer on the silicon. It can be shown that the statistical properties of the speckle pattern can be controlled. The intensity distribution is modified by the number of exposures and the correlation function is linked to the spatial distribution of the laser beam. Some examples of such photofabrication can be found using a Gaussian unmodified beam leading to Gaussian correlation photofabricated surfaces. In order to design random rough surfaces having a non Gaussian correlation we need to modify the laser beam shape. This modification is achieved using a DMD. The experimental processes from photoresist deposition to modified exposure are discussed in this paper.

Citation Download Citation

Vincent Brissonneau, Ludovic Escoubas, François Flory, and Gérard Berginc "Application of DMD: laser speckle control for rough surface photofabrication", Proc. SPIE 8254, Emerging Digital Micromirror Device Based Systems and Applications IV, 82540N (13 February 2012); https://doi.org/10.1117/12.905856

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Speckle pattern

Correlation function

Digital micromirror devices

Photoresist materials

Beam shaping

Speckle

Silicon

Show All Keywords

Keywords/Phrases

Search In:

Publication Years