Hard x-ray nano-beam characterization by ptychographic imaging

Christian G. Schroer; Susanne Hönig; Andy Goldschmidt; Robert Hoppe; Jens Patommel; Dirk Samberg; Andreas Schropp; Frank Seiboth; Sandra Stephan; Sebastian Schöder; Manfred Burghammer; Melissa Denecke; Gerd Wellenreuther; Gerald Falkenberg

doi:10.1117/12.893055

23 September 2011 Hard x-ray nano-beam characterization by ptychographic imaging

Christian G. Schroer, Susanne Hönig, Andy Goldschmidt, Robert Hoppe, Jens Patommel, Dirk Samberg, Andreas Schropp, Frank Seiboth, Sandra Stephan, Sebastian Schöder, Manfred Burghammer, Melissa Denecke, Gerd Wellenreuther, Gerald Falkenberg

Author Affiliations +

Proceedings Volume 8141, Advances in Computational Methods for X-Ray Optics II; 814103 (2011) https://doi.org/10.1117/12.893055
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Modern hard x-ray scanning microscopes generate x-ray beams with lateral sizes well below 100 nm. Characterizing these beams in terms of shape and size by conventional techniques is tedious, requires highly accurate test objects and stages, and yields only incomplete information. Since recently, we use a ptychographic scanning coherent diffraction imaging technique in order to characterize hard x-ray nano beams in x-ray scanning microscopes, obtaining a detailed quantitative picture of the complex wave field in the nano focus and allowing one to reconstruct the exit wave field behind the nano-focusing optic, giving detailed insight into its aberrations.

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Christian G. Schroer, Susanne Hönig, Andy Goldschmidt, Robert Hoppe, Jens Patommel, Dirk Samberg, Andreas Schropp, Frank Seiboth, Sandra Stephan, Sebastian Schöder, Manfred Burghammer, Melissa Denecke, Gerd Wellenreuther, and Gerald Falkenberg "Hard x-ray nano-beam characterization by ptychographic imaging", Proc. SPIE 8141, Advances in Computational Methods for X-Ray Optics II, 814103 (23 September 2011); https://doi.org/10.1117/12.893055

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