EUV mask preparation considering blank defects mitigation

Yuelin Du; Hongbo Zhang; Martin D. F. Wong; Rasit O. Topaloglu

doi:10.1117/12.896996

13 October 2011 EUV mask preparation considering blank defects mitigation

Yuelin Du, Hongbo Zhang, Martin D. F. Wong, Rasit O. Topaloglu

Proceedings Volume 8166, Photomask Technology 2011; 816611 (2011) https://doi.org/10.1117/12.896996
Event: SPIE Photomask Technology, 2011, Monterey, California, United States

Abstract

Due to the absence of defect-free blanks in extreme ultraviolet (EUV) lithography, defect mitigation is necessary before mass production. Currently almost all the defect mitigation methods are focused on mitigating the defect impact of one blank on one design. However, since the EUV mask vendors always have multiple designs and blanks in hand, it is also very important to consider all designs and blanks together to mitigate the total defect impact. This paper proposes a new EUV mask preparation strategy which optimally matches a set of defective blanks with multiple designs to mitigate the total defect impact. In the first step, an efficient layout relocation algorithm is adopted to minimize the defect impact of each blank on each design. Then, depending on whether blank defects are allowed to be compensated, we formulate the two different types of design-blank matching problems as flow problems and solve them optimally. Compared to sequential matching, the proposed simultaneous matching strategy shows advantages in both blank utilization and defect compensation cost minimization.

Citation Download Citation

Yuelin Du, Hongbo Zhang, Martin D. F. Wong, and Rasit O. Topaloglu "EUV mask preparation considering blank defects mitigation", Proc. SPIE 8166, Photomask Technology 2011, 816611 (13 October 2011); https://doi.org/10.1117/12.896996

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available