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Proceedings Article

Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques

[+] Author Affiliations
Olaf Stenzel, Mark Schürmann, Steffen Wilbrandt, Norbert Kaiser, Andreas Tünnermann

Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)

Mathias Mende, Henrik Ehlers, Detlev Ristau

Laser Zentrum Hannover e.V. (Germany)

Stefan Bruns, Michael Vergöhl

Fraunhofer Institute for Surface Engineering and Thin Films (Germany)

Werner Riggers

Laseroptik GmbH (Germany)

Martin Bischoff

Qioptiq Photonics GmbH & Co. KG (Germany)

Mario Held

Bte Bedampfungstechnik GmbH (Germany)

Proc. SPIE 8168, Advances in Optical Thin Films IV, 81681W (October 03, 2011); doi:10.1117/12.896775
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From Conference Volume 8168

  • Advances in Optical Thin Films IV
  • Michel Lequime; H. Angus Macleod; Detlev Ristau
  • Marseille, France | September 05, 2011

abstract

The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.

© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Olaf Stenzel ; Mark Schürmann ; Steffen Wilbrandt ; Norbert Kaiser ; Andreas Tünnermann, et al.
"Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques", Proc. SPIE 8168, Advances in Optical Thin Films IV, 81681W (October 03, 2011); doi:10.1117/12.896775; http://dx.doi.org/10.1117/12.896775


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