The present study deals with the characterization of hafnia, alumina, and zirconia coatings as well as mixtures thereof with respect to applications in the UV. Emphasis is placed on optical properties, particularly on the relation between UV refractive index and absorption edge. The shift of the coatings is investigated as well as the mechanical stress. Finally, we present the results of stress measurements performed for quarterwave stacks deposited on different substrates in a broad range of deposition temperatures. In this study, no systematic dependence of the result of the stress measurement on the substrate material and geometry could be identified.© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.