3D features measurement using YieldStar: an angle resolved polarized scatterometer

Anne-Laure Charley; Philippe Leray; Koen D'havé; Shaunee Cheng; Paul Hinnen; Fahong Li; Peter Vanoppen; Mircea Dusa

doi:10.1117/12.897582

30 September 2011 3D features measurement using YieldStar: an angle resolved polarized scatterometer

Anne-Laure Charley, Philippe Leray, Koen D'havé, Shaunee Cheng, Paul Hinnen, Fahong Li, Peter Vanoppen, Mircea Dusa

Proceedings Volume 8169, Optical Fabrication, Testing, and Metrology IV; 81690Q (2011) https://doi.org/10.1117/12.897582
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

Metrology on 3D features like line end gap in a SRAM structure is more challenging than on lines and spaces (L/S) structures. Scatterometry has been widely used on L/S structures and has enabled characterization of lithographic features providing with critical dimensions (CD) as well as feature height and side wall angle. In this paper, we will present the application of scatterometry to these challenging structures using an angle resolved polarized scatterometer: ASML YieldStar S-100. 3D features (line ends, brick walls,...) measurements will be presented. Measurement capability will be discussed in terms of sensitivity of the parameters of interest and correlation between them leading to a proper model choice.

Citation Download Citation

Anne-Laure Charley, Philippe Leray, Koen D'havé, Shaunee Cheng, Paul Hinnen, Fahong Li, Peter Vanoppen, and Mircea Dusa "3D features measurement using YieldStar: an angle resolved polarized scatterometer", Proc. SPIE 8169, Optical Fabrication, Testing, and Metrology IV, 81690Q (30 September 2011); https://doi.org/10.1117/12.897582

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