Efficient use of grating theories with partially coherent illumination

Jani Tervo; Heikki J. Hyvärinen; Toni Saastamoinen; Ismo Vartiainen; Jari Turunen

doi:10.1117/12.896805

4 October 2011 Efficient use of grating theories with partially coherent illumination

Jani Tervo, Heikki J. Hyvärinen, Toni Saastamoinen, Ismo Vartiainen, Jari Turunen

Proceedings Volume 8171, Physical Optics; 81710F (2011) https://doi.org/10.1117/12.896805
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

We discuss how the rigorous grating theory can be extended to cover also partially coherent illumination such that the method stays computationally reasonable. We first discuss the S-matrix formalism if the input field is not a simple plane wave, and then continue the approach to the case of partial coherence. We illustrate the approach by investigating the imaging of a grating in a classical bright-field imaging setup.

Citation Download Citation

Jani Tervo, Heikki J. Hyvärinen, Toni Saastamoinen, Ismo Vartiainen, and Jari Turunen "Efficient use of grating theories with partially coherent illumination", Proc. SPIE 8171, Physical Optics, 81710F (4 October 2011); https://doi.org/10.1117/12.896805

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