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Proceedings Article

Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography

[+] Author Affiliations
Gunay Yurtsever, Katarzyna Komorowska, Roel Baets

Ghent Univ. (Belgium)

Proc. SPIE 8091, Optical Coherence Tomography and Coherence Techniques V, 80910T (June 07, 2011); doi:10.1117/12.889920
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From Conference Volume 8091

  • Optical Coherence Tomography and Coherence Techniques V
  • Rainer A. Leitgeb; Brett E. Bouma
  • Munich, Germany | May 22, 2011

abstract

We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5 mm x 3 mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.

© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Gunay Yurtsever ; Katarzyna Komorowska and Roel Baets
"Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography", Proc. SPIE 8091, Optical Coherence Tomography and Coherence Techniques V, 80910T (June 07, 2011); doi:10.1117/12.889920; http://dx.doi.org/10.1117/12.889920


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