Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography

Gunay Yurtsever; Katarzyna Komorowska; Roel Baets

doi:10.1117/12.889920

7 June 2011 Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography

Gunay Yurtsever, Katarzyna Komorowska, Roel Baets

Proceedings Volume 8091, Optical Coherence Tomography and Coherence Techniques V; 80910T (2011) https://doi.org/10.1117/12.889920
Event: European Conferences on Biomedical Optics, 2011, Munich, Germany

Abstract

We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5 mm x 3 mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.

Citation Download Citation

Gunay Yurtsever, Katarzyna Komorowska, and Roel Baets "Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography", Proc. SPIE 8091, Optical Coherence Tomography and Coherence Techniques V, 80910T (7 June 2011); https://doi.org/10.1117/12.889920

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