Micro/nanoscale surface modification and structuring using lasers

Y. F. Lu

doi:10.1117/12.658302

1 March 2006 Micro/nanoscale surface modification and structuring using lasers

Y. F. Lu

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61060Z (2006) https://doi.org/10.1117/12.658302
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Various micro/nanoscale materials and devices are being developed for applications in biology, materials, electronics, chemistry, and physics. Areas such as micro/nanocomposites, molecular electronics, molecular motors, self-assembled nanoenergetics, and nanobiology are just a few examples. A major obstacle to making progress on the micro/nanoscale is the lack of powerful fabrication and diagnostic techniques that work effectively to make the structures and to determine the morphology, chemical composition, and electronic/optical properties. In particular, there is a lack of techniques to diagnose individual nanostructures to find their geometries, electronic properties, optical properties, and chemical compositions in a correlated manner. Laser material processing and characterization is traditionally used in microscale applications due to the diffraction limit of light. In order to apply laser-based techniques in nanotechnology, we have to develop methods which can overcome the optical diffraction limit. In this paper, we will review a few techniques developed in recent years, including laser-assisted scanning probe microscope, superfocusing by optical resonance in spherical particles, laser nanoimprinting, laser synthesis of quantum dots, laser annealing of ultrashow pn junctions, nanometer-order film thickness detection using rotational Raman spectroscopy, laser cleaning of nanoparticles, near-field-controlled material deposition, laser-assisted growth of carbon nanotubes, and laser synthesis of one-dimensional carbon structures.

Citation Download Citation

Y. F. Lu "Micro/nanoscale surface modification and structuring using lasers", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060Z (1 March 2006); https://doi.org/10.1117/12.658302

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available