Paper
1 March 2006 Design, fabrication, and characterization of nanometer-scale ridged aperture optical antennae
Xianfan Xu, Eric X. Jin, Liang Wang, Sreemanth Uppuluri
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Abstract
We investigate light concentration and field enhancement in nanometer-scale ridged aperture antennae. Resent numerical simulations have shown that nanoscale ridged apertures can concentrate light into nanometer domain. Most importantly, these ridge apertures also provide an optical transmission enhancement several orders of magnitude higher compared to regularly shaped nanoscale apertures. We employ the finite-difference time-domain (FDTD) method to design these apertures and fabricate them in thin metal films. A home-built near field scanning optical microscope (NSOM) is used to map the near-field intensity distribution of the light transmitted through these apertures. It is shown that the ridged apertures can produce a concentrated light spot far beyond the diffraction limit, with transmission enhancement orders of magnitude higher than regularly shaped apertures. Nanolithography applications of these nanoscale ridged aperture antennae are demonstrated.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xianfan Xu, Eric X. Jin, Liang Wang, and Sreemanth Uppuluri "Design, fabrication, and characterization of nanometer-scale ridged aperture optical antennae", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061J (1 March 2006); https://doi.org/10.1117/12.660722
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CITATIONS
Cited by 12 scholarly publications.
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KEYWORDS
Metals

Waveguides

Near field scanning optical microscopy

Near field

Aluminum

Finite-difference time-domain method

Nanolithography

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