Modeling the fabrication of nano-optical structures

Raymond C. Rumpf; Pradeep Srinivasan; Eric G. Johnson

doi:10.1117/12.652604

23 January 2006 Modeling the fabrication of nano-optical structures

Raymond C. Rumpf, Pradeep Srinivasan, Eric G. Johnson

Proceedings Volume 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV; 611004 (2006) https://doi.org/10.1117/12.652604
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Over the last two decades, considerable research has been devoted to micro-optic and now nano-optical structures. Fabrication methods have become sufficiently mature to realize most concepts, but due to physics inherent in the process, geometry is distorted. Edges are rounded, sidewalls are sloped, surfaces are rough, and etching or deposition not uniform. Deviations from "perfect" geometry can dramatically affect optical behavior. In order to address the impact of the "non-perfect" nature of fabrication, numerical methods for modeling fabrication is discussed and quantified for various examples. As an example, comprehensive modeling of near-field nano-patterning is described. Numerical and experimental results are presented of three-dimensional photonic crystals fabricated in a contact mask aligner using a standard UV lamp as the source.

Citation Download Citation

Raymond C. Rumpf, Pradeep Srinivasan, and Eric G. Johnson "Modeling the fabrication of nano-optical structures", Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 611004 (23 January 2006); https://doi.org/10.1117/12.652604

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available