Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror

[+] Author Affiliations
Julia W. Evans

Lawrence Livermore National Lab. and Univ. of California/Davis

Katie Morzinski, Scott Severson, Daren Dillon, Donald Gavel

Univ. of California/Santa Cruz

Lisa Poyneer, David Palmer, Scot Olivier

Lawrence Livermore National Lab.

Bruce Macintosh

Lawrence Livermore National Lab. and Univ. of California/Santa Cruz

Layra Reza

Univ. of California/Santa Cruz and Univ. of Texas/El Paso

Paul Bierden

Boston Micromachines Corp.

Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130I (January 23, 2006); doi:10.1117/12.648977
Text Size: A A A
From Conference Volume 6113

  • MEMS/MOEMS Components and Their Applications III
  • Scot S. Olivier; Srinivas A. Tadigadapa; Albert K. Henning
  • San Jose, CA | January 21, 2006

abstract

We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Julia W. Evans ; Katie Morzinski ; Scott Severson ; Lisa Poyneer ; Bruce Macintosh, et al.
"Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130I (January 23, 2006); doi:10.1117/12.648977; http://dx.doi.org/10.1117/12.648977


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.