Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror

Julia W. Evans; Katie Morzinski; Scott Severson; Lisa Poyneer; Bruce Macintosh; Daren Dillon; Layra Reza; Donald Gavel; David Palmer; Scot Olivier; Paul Bierden

doi:10.1117/12.648977

23 January 2006 Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror

Julia W. Evans, Katie Morzinski, Scott Severson, Lisa Poyneer, Bruce Macintosh, Daren Dillon, Layra Reza, Donald Gavel, David Palmer, Scot Olivier, Paul Bierden

Author Affiliations +

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130I (2006) https://doi.org/10.1117/12.648977
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

We have demonstrated that a microelectrical mechanical systems (MEMS) deformable mirror can be flattened to < 1 nm RMS within controllable spatial frequencies over a 9.2-mm aperture making it a viable option for high-contrast adaptive optics systems (also known as Extreme Adaptive Optics). The Extreme Adaptive Optics Testbed at UC Santa Cruz is being used to investigate and develop technologies for high-contrast imaging, especially wavefront control. A phase shifting diffraction interferometer (PSDI) measures wavefront errors with sub-nm precision and accuracy for metrology and wavefront control. Consistent flattening, required testing and characterization of the individual actuator response, including the effects of dead and low-response actuators. Stability and repeatability of the MEMS devices was also tested. An error budget for MEMS closed loop performance will summarize MEMS characterization.

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Julia W. Evans, Katie Morzinski, Scott Severson, Lisa Poyneer, Bruce Macintosh, Daren Dillon, Layra Reza, Donald Gavel, David Palmer, Scot Olivier, and Paul Bierden "Extreme adaptive optics testbed: performance and characterization of a 1024-MEMS deformable mirror", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130I (23 January 2006); https://doi.org/10.1117/12.648977

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