Paper
7 March 2006 Guided-wave Terahertz devices for sensing the properties of overlaid dielectric films
Author Affiliations +
Abstract
The on-chip detection of nanolitre volumes of dielectric material is demonstrated using terahertz (THz) pulses. Simultaneous analysis at different frequencies on separate, lithographically defined locations is shown to be possible using THz band-stop filter elements connected by a microstrip line. Integrated thin film low-temperature-grown GaAs photoconductive switches are used for THz pulse generation and detection within the microstrip interconnect. This technique is expected to be useful in sensing organic films such as DNA, and other biomolecular materials, in an on-chip environment.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Wood, J. E. Cunningham, A. G. Davies, I. C. Hunter, P. Tosch, and E. H. Linfield "Guided-wave Terahertz devices for sensing the properties of overlaid dielectric films", Proc. SPIE 6120, Terahertz and Gigahertz Electronics and Photonics V, 61200P (7 March 2006); https://doi.org/10.1117/12.660716
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KEYWORDS
Dielectrics

Terahertz radiation

Dielectric filters

Photoresist materials

Switches

Etching

Resonators

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