Integrated high-Q reflective cavities

T. W. Mossberg; C. Greiner; D. Iazikov

doi:10.1117/12.647604

24 February 2006 Integrated high-Q reflective cavities

T. W. Mossberg, C. Greiner, D. Iazikov

Proceedings Volume 6123, Integrated Optics: Devices, Materials, and Technologies X; 612315 (2006) https://doi.org/10.1117/12.647604
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

We report on the demonstration of several integrated slab-waveguide-based concentric Fabry- Perot resonators employing holographic Bragg reflectors as curved 2D cavity mirrors. The cavities, fabricated in a low-loss silica-on-silicon slab waveguide using high-fidelity deep ultra violet photolithographic fabrication, exhibit Q-factors approaching up to 10⁶ which are competitive with silicabased ring resonators. The Q-values achieved indicate very high slab waveguide homogeneity providing wavefront stability and extremely low loss from the volume-holographic lithographically scribed mirrors. Compared to silica-based ring resonators, the folded Fabry-Perot resonator design allows access to a substantially larger free spectral range by cavity shortening. Pathways to the implementation of highreflectivity and low loss distributed reflectors promise new directions in photonic integration with applications in sensing, filtering, and signal transport.

Citation Download Citation

T. W. Mossberg, C. Greiner, and D. Iazikov "Integrated high-Q reflective cavities", Proc. SPIE 6123, Integrated Optics: Devices, Materials, and Technologies X, 612315 (24 February 2006); https://doi.org/10.1117/12.647604

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