Experiment and modeling of tilted mirror MEMS variable optical attenuator

Chun He

doi:10.1117/12.674117

3 March 2006 Experiment and modeling of tilted mirror MEMS variable optical attenuator

Chun He

Proceedings Volume 6124, Optoelectronic Integrated Circuits VIII; 61240H (2006) https://doi.org/10.1117/12.674117
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

We developed model and unveiled the mechanism of the large wavelength-dependent attenuation (WDA) that has been hindering the development of tilting-mirror MEMS VOA. We developed a new tilting-mirror VOA with low WDA of <0.1dB at 20dB attenuation.

Citation Download Citation

Chun He "Experiment and modeling of tilted mirror MEMS variable optical attenuator", Proc. SPIE 6124, Optoelectronic Integrated Circuits VIII, 61240H (3 March 2006); https://doi.org/10.1117/12.674117

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