Manufacturing of aspherical optics by ion beam and measuring techniques

P. Médart; V. Busurin; P. Gailly; J. P. Collette; Y. Stockman

doi:10.1117/12.674203

9 June 2006 Manufacturing of aspherical optics by ion beam and measuring techniques

P. Médart, V. Busurin, P. Gailly, J. P. Collette, Y. Stockman

Proceedings Volume 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 61490G (2006) https://doi.org/10.1117/12.674203
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

Aspherical optics are more and more exploited in optical set-up since they reduce the number of components and therefore the overall size and weight of the system. Their manufacturing has been made easier by ion beam etching for many years. Nevertheless, the ablation rate has to be known accurately for each material and the degradation of the surface roughness has to be taken under control. Some examples of achievements will be shown. The main key feature is the knowledge of the original absolute shape of the surface to be figured. In some cases, interferometric measurement is not well suited and heavy to set up for high aspherical surfaces with deep sag. To avoid the drawbacks of interferometry measurements, a low cost scanning measurement device has been designed and built whose performance allows defining the topology of any surface up to 150 * 90 mm² area with an accuracy better than 80 nm. Perspective of extension to larger surface will be presented.

Citation Download Citation

P. Médart, V. Busurin, P. Gailly, J. P. Collette, and Y. Stockman "Manufacturing of aspherical optics by ion beam and measuring techniques", Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61490G (9 June 2006); https://doi.org/10.1117/12.674203

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