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Proceedings Article

Periodic nano trench structure fabricated by high-speed scanning CW laser

[+] Author Affiliations
Satoru Kaneko

Kanagawa Industrial Technology Ctr. (Japan) and Tokyo Institute of Technology (Japan)

Takeshi Ito, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Takeshi Ozawa, Yasuo Hirabayashi

Kanagawa Industrial Technology Ctr. (Japan)

Akira Matsuno, Takashi Nire

Phoeton Corp. (Japan)

Mamoru Yoshimoto

Tokyo Institute of Technology (Japan)

Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430U (February 9, 2012); doi:10.1117/12.905970
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From Conference Volume 8243

  • Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
  • Guido Hennig; Xianfan Xu; Bo Gu; Yoshiki Nakata
  • San Francisco, California, USA | January 21, 2012

abstract

We report periodic nanostructure on solid material irradiated by scanning continuous wave (CW) laser. Long periodic nano strip grating lines (nano-SGL) formed, not in a spot, but along the trace of the beam scan, literally parallel to each other with a at trough between the strip lines. The period of nanostructure was varied with the laser power between 500 nm and 800 nm, which equals to wavelengths used for laser scanning of green and infrared lasers. Thermal simulation and Raman spectra indicated the temperature of target exceeded the melting temperature to form the periodic nanostructure on target materials.

© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation

Satoru Kaneko ; Takeshi Ito ; Manabu Yasui ; Chihiro Kato ; Satomi Tanaka, et al.
"Periodic nano trench structure fabricated by high-speed scanning CW laser", Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430U (February 9, 2012); doi:10.1117/12.905970; http://dx.doi.org/10.1117/12.905970


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