Dimensional variation of polymer substrate electrode production

Brian W. Anthony; Kasra Namvari

doi:10.1117/12.908812

14 February 2012 Dimensional variation of polymer substrate electrode production

Brian W. Anthony, Kasra Namvari

Proceedings Volume 8251, Microfluidics, BioMEMS, and Medical Microsystems X; 82510G (2012) https://doi.org/10.1117/12.908812
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Electrodes are necessary components for measuring changes in electrical properties in many microfluidic devices. The consistency of the dimensions of manufactured electrode is critical to the repeatability of measurements. We analyze the electrode dimensions to characterize a manufacturing process. Optical imaging is used to obtain high-resolution images of the electrodes and an algorithm was developed in order to estimate the critical dimensions of interdigitated electrode fingers from the images. The results show that the dimensional variation inherent in the manufacturing of the electrodes had insignificant effect on the performance of the electrodes.

Citation Download Citation

Brian W. Anthony and Kasra Namvari "Dimensional variation of polymer substrate electrode production", Proc. SPIE 8251, Microfluidics, BioMEMS, and Medical Microsystems X, 82510G (14 February 2012); https://doi.org/10.1117/12.908812

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