Paper
15 February 2012 Critical considerations of pupil alignment to achieve open-loop control of MEMS deformable mirror in nonlinear laser scanning fluorescence microscopy
Author Affiliations +
Proceedings Volume 8253, MEMS Adaptive Optics VI; 82530H (2012) https://doi.org/10.1117/12.909652
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
In this paper we present an alignment methodology for a non-linear laser scanning fluorescence microscopic imaging system integrated with a MEMS deformable mirror that is used to compensate microscope aberrations and improve sample image quality. The procedure uses an accurate open-loop control mechanism of the MEMS DM, a high resolution CMOS camera and a compact Shack-Hartmann wavefront sensor. The success of the indirect AO control method used by the microscope to compensate aberrations requires careful alignment of the optical system, specifically the DM conjugate planes in the scanning laser optical path. Considerations of this procedure are presented here, in addition to an assessment of the final accuracy of the alignment task is presented, by verifying the pupil conjugation and wavefront response. This method can also serve as a regular check-up of the system's performance and trouble-shoot for system misalignment.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Sun, Yang Lu, Jason B. Stewart, Thomas G. Bifano, and Charles P. Lin "Critical considerations of pupil alignment to achieve open-loop control of MEMS deformable mirror in nonlinear laser scanning fluorescence microscopy", Proc. SPIE 8253, MEMS Adaptive Optics VI, 82530H (15 February 2012); https://doi.org/10.1117/12.909652
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Cited by 3 scholarly publications.
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KEYWORDS
Wavefront sensors

Microelectromechanical systems

Adaptive optics

Microscopes

Laser scanners

Mirrors

Control systems

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