Time-average interference microscopy for vibration testing of silicon microelements

Krzysztof Patorski; Adam Styk; Zbigniew Sienicki

doi:10.1117/12.675761

20 April 2006 Time-average interference microscopy for vibration testing of silicon microelements

Krzysztof Patorski, Adam Styk, Zbigniew Sienicki

Proceedings Volume 6158, Lightmetry and Light and Optics in Biomedicine 2004; 615806 (2006) https://doi.org/10.1117/12.675761
Event: Lightmetry and Light and Optics in Biomedicine 2004, 2004, Warsaw, Poland

Abstract

Fast-growing applications of microelements and microsystems, including actuators and sensors, introduce pioneering requirements on their design and testing to ensure product quality and reliability. Optical whole-field experimental techniques are of particular interest because of their speed, noncontact and noncontaminating character. Vibration testing enables providing material properties at the microlevel, design validation, and the information for the manufacturing process optimization. In particular, time average two-beam interference microscopy with automated computer processing of interferograms using the temporal phase shifting (TPS) method is reviewed. The principle of retrieving the zero-order Bessel function (sinusoidal vibrations) by calibrating the contrast variation or intensity modulation of time-average recordings is presented. The influence of main experimental errors is discussed using numerical simulations and comparisons with experimental data. Exemplary results of measurements performed with active micromembranes and AFM cantilevers are presented.

Citation Download Citation

Krzysztof Patorski, Adam Styk, and Zbigniew Sienicki "Time-average interference microscopy for vibration testing of silicon microelements", Proc. SPIE 6158, Lightmetry and Light and Optics in Biomedicine 2004, 615806 (20 April 2006); https://doi.org/10.1117/12.675761

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