Performance modeling of optical metrology systems

Kalyan Dutta; Robert S. Benson

doi:10.1117/12.460878

26 February 2003 Performance modeling of optical metrology systems

Kalyan Dutta, Robert S. Benson

Proceedings Volume 4852, Interferometry in Space; (2003) https://doi.org/10.1117/12.460878
Event: Astronomical Telescopes and Instrumentation, 2002, Waikoloa, Hawai'i, United States

Abstract

The design of precision optical gauges for metrology is facilitated by predictions of performance by means of computer simulation. For example, consequences of design parameter variations can be investigated before committing to the time and expense of hardware fabrication or procurement. Once the components are assembled, puzzling test results may be understood by simulating various misalignments. Classical geometric optical ray trace analysis of these systems is not capable of predicting diffraction effects which are important in determining the ultimate achievable metrology precision. We present details of a simulation approach which we have developed for the diffraction analysis of such systems. Optical signals are represented as two-dimensional scalar fields, and paraxial scalar diffraction theory is used to calculate the propagation of signals -- through various optical elements, such as apertures, lenses and corner cubes - to detector focal planes. The simulation includes coherent combination of signal and local reference wavefronts at the focal plane, and modeling the measurement of optical phase by heterodyne detection - a capability critical to optical metrology. We discuss the capabilities, limitations and sources of error inherent in our approach; present the results of modeling one or more metrology systems which are currently under laboratory development; indicate how simulation can identify sources and magnitudes of measurement error; and show correspondence of simulations with laboratory measurement.

Citation Download Citation

Kalyan Dutta and Robert S. Benson "Performance modeling of optical metrology systems", Proc. SPIE 4852, Interferometry in Space, (26 February 2003); https://doi.org/10.1117/12.460878

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