Paper
2 February 2012 Temperature-independent vertically coupled double-ring sensor
Author Affiliations +
Proceedings Volume 8266, Silicon Photonics VII; 826603 (2012) https://doi.org/10.1117/12.908902
Event: SPIE OPTO, 2012, San Francisco, California, United States
Abstract
Optical biosensors on silicon platforms have demonstrated their great potential in label-free detection and analysis tool. The major challenge of ring resonator based optical biosensors is their high sensitivity to temperature variations. We have designed a double-ring resonator biosensor using a vertical coupling method. Simulation results show that the double-ring configuration effectively eliminates the temperature and environmental fluctuations by the resonant wavelength shift correction induced from the reference ring. The coupling gap in the vertical coupling method can be tuned by timing the deposition/growth rate of the space layer, without the need of any advanced lithography. The vertical coupling method allows a low fabrication cost.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yule Xiong and Winnie N. Ye "Temperature-independent vertically coupled double-ring sensor", Proc. SPIE 8266, Silicon Photonics VII, 826603 (2 February 2012); https://doi.org/10.1117/12.908902
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Resonators

Waveguides

Silicon

Biosensors

Cladding

Temperature metrology

Sensors

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