Paper
26 April 2006 SNOM probes: fabrication and possibilities for imaging, diagnostics and modification of sample surface
V. F. Dryakhlushin, V. P. Veiko
Author Affiliations +
Proceedings Volume 6161, International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies; 616101 (2006) https://doi.org/10.1117/12.674955
Event: International Conference on Lasers, Applications, and Technologies 2005, 2005, St. Petersburg, Russian Federation
Abstract
Basic principles of laser assisted and chemical etching processes for scanning near-field optical microscope (SNOM) probes formation and control techniques are presented. The thermal, temporal and chemical regimes are consider in order to provide stable reproducibility and high quality of SNOM probes on the base adiabatically tapered single-mode optical fiber. The advantages of different methods of SNOM fabrication are discussed. Application of scanning near-field microscopy for imaging, spectroscopy, diagnostics and nanolithography with nanometer resolution are observed. The various methods of diagnostics of sample surface and nanometer objects (spectroscopy, near-field photoconductivity, mapping of radiating surfaces and others) are presented. The possibilities of nanometer pattern creation using SNOM for superhigh density data recording and nanoelectronic devices are discussed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. F. Dryakhlushin and V. P. Veiko "SNOM probes: fabrication and possibilities for imaging, diagnostics and modification of sample surface", Proc. SPIE 6161, International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies, 616101 (26 April 2006); https://doi.org/10.1117/12.674955
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KEYWORDS
Near field scanning optical microscopy

Near field optics

Diagnostics

Near field

Nanolithography

Wet etching

Laser applications

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