Surface topography and optical performance measurement of microlenses used in high power VCSEL systems

I. Erichsen; S. Krey

doi:10.1117/12.908130

7 February 2012 Surface topography and optical performance measurement of microlenses used in high power VCSEL systems

I. Erichsen, S. Krey

Proceedings Volume 8276, Vertical-Cavity Surface-Emitting Lasers XVI; 82760C (2012) https://doi.org/10.1117/12.908130
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

The demand for lasers with specific intensity distributions has led to the development of high power VCSEL systems. These consist of arrays of high power VCSELs combined with microlenses allowing for intensity distributions tailored to the needs of each specific application. A Shack-Hartmann based instrument has been developed for the measurement of these lenses in reflection as well as in transmission. In addition the form tools used for the microlens production can be measured with this set up. The comparison of measured surface profiles and optical properties with the particular design values then allows for optimization of the manufacturing process.

Citation Download Citation

I. Erichsen and S. Krey "Surface topography and optical performance measurement of microlenses used in high power VCSEL systems", Proc. SPIE 8276, Vertical-Cavity Surface-Emitting Lasers XVI, 82760C (7 February 2012); https://doi.org/10.1117/12.908130

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