STEAM: a software tool based on empirical analysis for micro electro mechanical systems

Archana Devasia; Ajay Pasupuleti; Ferat Sahin

doi:10.1117/12.674618

17 March 2006 STEAM: a software tool based on empirical analysis for micro electro mechanical systems

Archana Devasia, Ajay Pasupuleti, Ferat Sahin

Proceedings Volume 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV; 61750I (2006) https://doi.org/10.1117/12.674618
Event: Nondestructive Evaluation for Health Monitoring and Diagnostics, 2006, San Diego, CA, United States

Abstract

In this research a generalized software framework that enables accurate computer aided design of MEMS devices is developed. The proposed simulation engine utilizes a novel material property estimation technique that generates effective material properties at the microscopic level. The material property models were developed based on empirical analysis and the behavior extraction of standard test structures. A literature review is provided on the physical phenomena that govern the mechanical behavior of thin films materials. This survey indicates that the present day models operate under a wide range of assumptions that may not be applicable to the micro-world. Thus, this methodology is foreseen to be an essential tool for MEMS designers as it would develop empirical models that relate the loading parameters, material properties, and the geometry of the microstructures with its performance characteristics. This process involves learning the relationship between the above parameters using non-parametric learning algorithms such as radial basis function networks and genetic algorithms. The proposed simulation engine has a graphical user interface (GUI) which is very adaptable, flexible, and transparent. The GUI is able to encompass all parameters associated with the determination of the desired material property so as to create models that provide an accurate estimation of the desired property. This technique was verified by fabricating and simulating bilayer cantilevers consisting of aluminum and glass (TEOS oxide) in our previous work. The results obtained were found to be very encouraging.

Citation Download Citation

Archana Devasia, Ajay Pasupuleti, and Ferat Sahin "STEAM: a software tool based on empirical analysis for micro electro mechanical systems", Proc. SPIE 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV, 61750I (17 March 2006); https://doi.org/10.1117/12.674618

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available