Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling, and nanopolishing

Wico C. L. Hopman; René M. de Ridder; Shankar Selvaraja; Cazimir G. Bostan; Vishwas J. Gadgil; Laurens Kuipers; Alfred Driessen

doi:10.1117/12.666788

18 April 2006 Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling, and nanopolishing

Wico C. L. Hopman, René M. de Ridder, Shankar Selvaraja, Cazimir G. Bostan, Vishwas J. Gadgil, Laurens Kuipers, Alfred Driessen

Author Affiliations +

Proceedings Volume 6182, Photonic Crystal Materials and Devices III (i.e. V); 61820V (2006) https://doi.org/10.1117/12.666788
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused Ion Beam milling experiments are highlighted: the first one shows how photonic crystals can be fast and accurate milled into a Si membrane, whereas the second experiment demonstrates how focused ion beam milling can turn a rough surface into a well-patterned nano-smooth surface. The previously ultra rough surface showed no detectable roughness after milling due to the nanopolishing effect of the focused ion beam milling.

Citation Download Citation

Wico C. L. Hopman, René M. de Ridder, Shankar Selvaraja, Cazimir G. Bostan, Vishwas J. Gadgil, Laurens Kuipers, and Alfred Driessen "Realization of two-dimensional air-bridge silicon photonic crystals by focused ion beam, milling, and nanopolishing", Proc. SPIE 6182, Photonic Crystal Materials and Devices III (i.e. V), 61820V (18 April 2006); https://doi.org/10.1117/12.666788

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