Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Yves Emery; Etienne Cuche; François Marquet; Nicolas Aspert; Pierre Marquet; Jonas Kühn; Mikhail Botkine; Tristan Colomb; Frédéric Montfort; Florian Charrière; Christian Depeursinge; Patrick Debergh; Ramiro Conde

doi:10.1117/12.660029

21 April 2006 Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Yves Emery, Etienne Cuche, François Marquet, Nicolas Aspert, Pierre Marquet, Jonas Kühn, Mikhail Botkine, Tristan Colomb, Frédéric Montfort, Florian Charrière, Christian Depeursinge, Patrick Debergh, Ramiro Conde

Author Affiliations +

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 61860N (2006) https://doi.org/10.1117/12.660029
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micromirror. This enables the definition of the linear, non-linear, and modal resonance zones of its dynamical response.

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Yves Emery, Etienne Cuche, François Marquet, Nicolas Aspert, Pierre Marquet, Jonas Kühn, Mikhail Botkine, Tristan Colomb, Frédéric Montfort, Florian Charrière, Christian Depeursinge, Patrick Debergh, and Ramiro Conde "Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860N (21 April 2006); https://doi.org/10.1117/12.660029

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