A multilayer surface-enhanced Raman scattering (SERS) substrate geometry providing
significantly greater SERS enhancements, longer active lifetimes, better reproducibility, and lower
detection limits for trace chemical analysis than traditional SERS substrates has been developed. We
have fabricated and characterized this novel class of multilayered metal film-based SERS substrates,
which are capable of enhancing SERS signals over an order of magnitude relative to conventional
metal film over nanostructure substrates. These multilayer enhanced metal film substrates are
fabricated by repeated vapor deposition of metal films over nanometer sized structures. Different
sizes of nanostructures were evaluated in order to obtain the optimal SERS enhancements.
Meanwhile, different dielectric coatings were fabricated between silver layers, and SERS
enhancements were evaluated for each type. Additionally, different metals, such as gold, were used
to further optimize the stability and reproducibility of these novel substrates. Silver oxide layers
produced at elevated temperatures were also investigated to accelerate the fabrication rate of these
multilayer substrates. Finally, this paper also discusses the application of these novel multilayer
substrates for trace detection of chemical agents and simulants.
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