Paper
30 January 2012 Integrated interferometer for measuring three-dimensional vibrations based on spherical cooperative target
Xuejie Zhang, Dean Liu, Tao Feng, Fang Liu, Jie Miao, Jianqiang Zhu
Author Affiliations +
Proceedings Volume 8351, Third Asia Pacific Optical Sensors Conference; 83510Y (2012) https://doi.org/10.1117/12.914388
Event: Asia Pacific Optical Sensors Conference, 2012, Sydney, Australia
Abstract
This paper proposes a new method for measuring three-dimensional vibrations. By a spherical cooperative target, the system realizes interference from a spherical wave and a plane wave. It solves the problem of complex changes in interference fringes when two spherical waves are used to measure three-dimensional vibration. And the vibration calculation is very simple. Meanwhile, the interferometer integrates two interference arms into a beamsplitter by coating design and can monitor the stability of the system itself. Theoretical analysis and experiment are performed. The experiment results indicate that the method can monitor three-dimensional vibrations accurately.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xuejie Zhang, Dean Liu, Tao Feng, Fang Liu, Jie Miao, and Jianqiang Zhu "Integrated interferometer for measuring three-dimensional vibrations based on spherical cooperative target", Proc. SPIE 8351, Third Asia Pacific Optical Sensors Conference, 83510Y (30 January 2012); https://doi.org/10.1117/12.914388
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KEYWORDS
Spherical lenses

Interferometers

3D acquisition

Beam splitters

Mirrors

Coating

Laser interferometry

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