Optical methane detection sensor using an interferometric-structured optical planar waveguide

Myoung Jin Kim; Sung Hwan Hwang; Woo-Jin Lee; Eun Joo Jung; Byung Sup Rho

doi:10.1117/12.915928

30 January 2012 Optical methane detection sensor using an interferometric-structured optical planar waveguide

Myoung Jin Kim, Sung Hwan Hwang, Woo-Jin Lee, Eun Joo Jung, Byung Sup Rho

Proceedings Volume 8351, Third Asia Pacific Optical Sensors Conference; 83510Z (2012) https://doi.org/10.1117/12.915928
Event: Asia Pacific Optical Sensors Conference, 2012, Sydney, Australia

Abstract

We present and optical methane sensor that employs a Mach-Zehnder interferometer formed on a planar waveguide. The overclad of only one arm of interferometer is partially etched up to the boundary between the core and clad. Then, the etched region is coated by SnO2 thin layer and the sensor module is annealed at high temperature. When the fabricated sensor module is exposed to methane gas, the interferogram is changed and quickly saturated in 10 seconds.

Citation Download Citation

Myoung Jin Kim, Sung Hwan Hwang, Woo-Jin Lee, Eun Joo Jung, and Byung Sup Rho "Optical methane detection sensor using an interferometric-structured optical planar waveguide", Proc. SPIE 8351, Third Asia Pacific Optical Sensors Conference, 83510Z (30 January 2012); https://doi.org/10.1117/12.915928

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