Paper
30 January 2012 Sol-gel surface functionalisation by cold-processing for optical sensor applications
George Huyang, Ingemar Petermann, John Canning, Maxwell J. Crossley
Author Affiliations +
Proceedings Volume 8351, Third Asia Pacific Optical Sensors Conference; 83512O (2012) https://doi.org/10.1117/12.915944
Event: Asia Pacific Optical Sensors Conference, 2012, Sydney, Australia
Abstract
The structure and physical properties of a thin titania sol-gel layer, prepared on silicon and silica surfaces by cold processing and spin-coating techniques, were examined. A series of spectroscopic (FTIR, UV-VIS spectroscopy and ellipsometry) and microscopic (light microscopy, SEM and EDS) techniques were used to examine the chemical and physical uniformities of the sol-gel layers. Conditions were established to generate uniform layers reproducibly. The high refractive index, selective binding to organic functional groups and the light and gas transmission properties of the titania layers can be successfully made use of for new optical sensor applications.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
George Huyang, Ingemar Petermann, John Canning, and Maxwell J. Crossley "Sol-gel surface functionalisation by cold-processing for optical sensor applications", Proc. SPIE 8351, Third Asia Pacific Optical Sensors Conference, 83512O (30 January 2012); https://doi.org/10.1117/12.915944
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KEYWORDS
Sol-gels

Silicon

Silica

Refractive index

Scanning electron microscopy

Semiconducting wafers

Optical sensors

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