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Proceedings Article

Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution

[+] Author Affiliations
Ju-Yi Lee, Hui-Yi Chen

National Central Univ. (Taiwan)

Cheng-Chih Hsu, Chyan-Chyi Wu

Industrial Technology Research Institute (Taiwan)

Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800J (October 13, 2006); doi:10.1117/12.716145
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From Conference Volume 6280

  • Third International Symposium on Precision Mechanical Measurements
  • Urumqi, China | August 02, 2006

abstract

A novel method of the measurement of in-plane displacement is presented. This method includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The phase variation which resulted from the grating movement is measured by an optical heterodyne interferometer. The short and long displacement can be measured by our method. The theoretical resolution is about 1 pm. If considering the high frequency noise, the measurement error or resolution is about 0.2 nm yet.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Ju-Yi Lee ; Hui-Yi Chen ; Cheng-Chih Hsu and Chyan-Chyi Wu
"Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800J (October 13, 2006); doi:10.1117/12.716145; http://dx.doi.org/10.1117/12.716145


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