Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution

Ju-Yi Lee; Hui-Yi Chen; Cheng-Chih Hsu; Chyan-Chyi Wu

doi:10.1117/12.716145

13 October 2006 Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution

Ju-Yi Lee, Hui-Yi Chen, Cheng-Chih Hsu, Chyan-Chyi Wu

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62800J (2006) https://doi.org/10.1117/12.716145
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

A novel method of the measurement of in-plane displacement is presented. This method includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The phase variation which resulted from the grating movement is measured by an optical heterodyne interferometer. The short and long displacement can be measured by our method. The theoretical resolution is about 1 pm. If considering the high frequency noise, the measurement error or resolution is about 0.2 nm yet.

Citation Download Citation

Ju-Yi Lee, Hui-Yi Chen, Cheng-Chih Hsu, and Chyan-Chyi Wu "Heterodyne interferometer for measurement of in-plane displacement with subnanometer resolution", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800J (13 October 2006); https://doi.org/10.1117/12.716145

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