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Proceedings Article

Wavefront sensing by an aperiodic diffractive microlens array

[+] Author Affiliations
Lars Seifert, Thomas Ruppel, Tobias Haist, Wolfgang Osten

Univ. Stuttgart (Germany)

Proc. SPIE 6293, Interferometry XIII: Applications, 629302 (August 14, 2006); doi:10.1117/12.677845
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From Conference Volume 6293

  • Interferometry XIII: Applications
  • San Diego, California, USA | August 13, 2006

abstract

Shack-Hartmann sensors are commonly used wavefront sensors in a large field of applications, like adaptive optics, beam characterization and non-contact measurements. They are popular because of the ease of use and the robustness of the sensor. We introduce a new way to improve the performance of miniaturized and massproducible optical wavefront sensors for industrial inspection: A sensor design due to an aperiodic diffractive element working as microlens array allows the use of small and cost-efficient detector chips. The diffractive element was optimized using raytracing and thin element approximation (done in Zemax). As an example, we present the design and realization of a sensor for laboratory use with a measurement diameter of 20mm. We show an example measurement and results concerning dynamic range. The measurement accuracy was determined by measuring spherical waves.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Lars Seifert ; Thomas Ruppel ; Tobias Haist and Wolfgang Osten
"Wavefront sensing by an aperiodic diffractive microlens array", Proc. SPIE 6293, Interferometry XIII: Applications, 629302 (August 14, 2006); doi:10.1117/12.677845; http://dx.doi.org/10.1117/12.677845


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