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Proceedings Article

Multi-wavelength digital holographic metrology

[+] Author Affiliations
Carl C. Aleksoff

Coherix, Inc.

Proc. SPIE 6311, Optical Information Systems IV, 63111D (August 30, 2006); doi:10.1117/12.686727
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From Conference Volume 6311

  • Optical Information Systems IV
  • Bahram Javidi; Demetri Psaltis; H. John Caulfield
  • San Diego, California, USA | August 13, 2006

abstract

A digital holographic metrology technique is described for measuring the three-dimensional shape of manufactured parts. The technique uses optical fibers to set up a near equal path interferometer, steps through multiple frequencies with a tunable laser, steps through multiple phases using a fiber based phase shifter, uses an off-axis parabolic mirror to collimate the light, and generates a digital hologram that leads to surface flatness measurements accuracies better than 1 micron over large surfaces. An example result for an automobile engine part is given using a Coherix Inc., ShapixTM 2000 instrument.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Carl C. Aleksoff
"Multi-wavelength digital holographic metrology", Proc. SPIE 6311, Optical Information Systems IV, 63111D (August 30, 2006); doi:10.1117/12.686727; http://dx.doi.org/10.1117/12.686727


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