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Proceedings Article

Novel compact spectrophotometer for EUV optics characterization

[+] Author Affiliations
K. Starke, H. Blaschke, L. Jensen, S. Nevas, D. Ristau

Laser Zentrum Hannover e.V. (Germany)

R. Lebert, C. Wies

AIXUV GmbH (Germany)

A. Bayer, F. Barkusky, K. Mann

Laser Lab. Göttingen e.V. (Germany)

Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631701 (August 29, 2006); doi:10.1117/12.686878
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From Conference Volume 6317

  • Advances in X-Ray/EUV Optics, Components, and Applications
  • Ali M. Khounsary; Christian Morawe
  • San Diego, California, USA | August 13, 2006


For the development of pioneering optical components for beam collimation and shaping, test set-ups are indispensable for characterizing the reflectance and transmittance over the relevant spectral range. Since radiation sources with a sufficiently high brilliance were only available at synchrotron devices up to now, the characterization of the spectral characteristics was concentrated at large-scale research institutions. In contrast to that, a strong need can be noticed for innovative small and medium companies to use compact and flexible in-house spectrophotometers accelerating product development. In the framework of the present collaboration, a novel table-top spectrophotometer for measuring the spectral characteristics of medium scale EUV-optics (up to 50mm diameter) in the spectral range from 11 to 20nm was developed. The device is based on a new polychromatic measurement principle using the direct irradiation of a compact EUV-tube for illuminating the sample and a broad-band spectrometer for detecting the probe and reference beam. The samples can be investigated under different angles of incidence and in respect to lateral dependencies. In the present paper, first results with different reflecting and transmitting EUV-optical elements demonstrate flexibility, and the achieved spectral resolution and accuracy is presented.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

K. Starke ; H. Blaschke ; L. Jensen ; S. Nevas ; D. Ristau, et al.
"Novel compact spectrophotometer for EUV optics characterization", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631701 (August 29, 2006); doi:10.1117/12.686878; http://dx.doi.org/10.1117/12.686878

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