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Proceedings Article

A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution

[+] Author Affiliations
C. Rau

Univ. of Illinois at Urbana-Champaign and Purdue Univ. and National Institute of Standards and Technology

V. Crecea, K. M. Peterson, P. R. Jemian, X. Yu, P. V. Braun, T.-C. Chiang

Univ. of Illinois at Urbana-Champaign

C.-P. Richter

Northwestern Univ.

U. Neuhäusler

Univ. Bielefeld (Germany)

G. Schneider

BESSY GmbH (Germany)

I. K. Robinson

Univ. College London (United Kingdom)

Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181G (September 07, 2006); doi:10.1117/12.680975
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From Conference Volume 6318

  • Developments in X-Ray Tomography V
  • Ulrich Bonse
  • San Diego, California, USA | August 13, 2006

abstract

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

C. Rau ; V. Crecea ; C.-P. Richter ; K. M. Peterson ; P. R. Jemian, et al.
"A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution", Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181G (September 07, 2006); doi:10.1117/12.680975; http://dx.doi.org/10.1117/12.680975


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