Paper
14 September 2006 Design and fabrication of polymer-based photonic crystals
Author Affiliations +
Abstract
Photonic have crystals shown promise in a variety of applications. Recently, there has been a great interest in designing and building three-dimensional (3D) photonic crystals whose fabrication can be integrated with standard CMOS processes. In this paper, we explore both of these areas in more detail. We first present techniques for modeling 3D photonic crystals and the analysis of practical lattice configurations. We then discuss our process for fabricating such structures built on standard lithography methods. We conclude by showing how these techniques have been used to design and build practical photonic crystal structures capable integration with CMOS circuitry.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric J. Kelmelis, Peng Yao, Shouyuan Shi, Ahmed Sharkawy, and Dennis W. Prather "Design and fabrication of polymer-based photonic crystals", Proc. SPIE 6331, Linear and Nonlinear Optics of Organic Materials VI, 633106 (14 September 2006); https://doi.org/10.1117/12.681379
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Cited by 1 scholarly publication.
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KEYWORDS
Photonic crystals

Polymers

Photomasks

Dispersion

Lithography

3D modeling

Wave propagation

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