Maximum likelihood estimation as a general method of combining subaperture data for interferometric testing

Peng Su; Jim Burge; Robert A. Sprowl; Jose Sasian

doi:10.1117/12.692233

12 July 2006 Maximum likelihood estimation as a general method of combining subaperture data for interferometric testing

Peng Su, Jim Burge, Robert A. Sprowl, Jose Sasian

Author Affiliations +

Proceedings Volume 6342, International Optical Design Conference 2006; 63421X (2006) https://doi.org/10.1117/12.692233
Event: International Optical Design Conference 2006, 2006, Vancouver, BC, Canada

Abstract

Interferometers accurately measure the difference between two wavefronts, one from a reference surface and the other from an unknown surface. If the reference surface is near-perfect or is accurately known from some other test, then the shape of the unknown surface can be determined. We investigate the case where neither the reference surface nor the surface under test is known. By making multiple modulated measurements where both surfaces are translated and rotated, we obtain sufficient information to reconstruct the figure of both surfaces. We have developed software that provides a maximum likelihood estimation of both surfaces, as well as an assessment of the quality of the reconstruction. This was demonstrated for the measurement of a large flat mirror, using a smaller reference mirror that has significant shape errors.

Citation Download Citation

Peng Su, Jim Burge, Robert A. Sprowl, and Jose Sasian "Maximum likelihood estimation as a general method of combining subaperture data for interferometric testing", Proc. SPIE 6342, International Optical Design Conference 2006, 63421X (12 July 2006); https://doi.org/10.1117/12.692233

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