Aberration functions for microlithographic lens

Tomoyuki Matsuyama; Tomoko Ujike

doi:10.1117/12.692226

21 July 2006 Aberration functions for microlithographic lens

Tomoyuki Matsuyama, Tomoko Ujike

Proceedings Volume 6342, International Optical Design Conference 2006; 63422D (2006) https://doi.org/10.1117/12.692226
Event: International Optical Design Conference 2006, 2006, Vancouver, BC, Canada

Abstract

We proposed a series of orthogonal aberration functions, which is suitable for a microlithographic projection lens. In this paper, general explanation and numbering of the orthogonal aberration functions are reviewed.

Citation Download Citation

Tomoyuki Matsuyama and Tomoko Ujike "Aberration functions for microlithographic lens", Proc. SPIE 6342, International Optical Design Conference 2006, 63422D (21 July 2006); https://doi.org/10.1117/12.692226

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