Surface inspection of hard to reach industrial parts using low-coherence interferometry

M. L. Dufour; G. Lamouche; S. Vergnole; B. Gauthier; C. Padioleau; M. Hewko; S. Lévesque; V. Bartulovic

doi:10.1117/12.707806

8 September 2006 Surface inspection of hard to reach industrial parts using low-coherence interferometry

M. L. Dufour, G. Lamouche, S. Vergnole, B. Gauthier, C. Padioleau, M. Hewko, S. Lévesque, V. Bartulovic

Proceedings Volume 6343, Photonics North 2006; 63431Z (2006) https://doi.org/10.1117/12.707806
Event: Photonics North 2006, 2006, Quebec City, Canada

Abstract

Optical inspection tools based on low-coherence interferometry and specialized for hard to reach industrial parts are presented. A common path configuration using optical fiber components is described. Small diameter probes originally developed for biomedical applications have been specialized for industrial inspection. Probes that can be used with a Cartesian surface scanning system or a cylindrical scanning system are presented. The probes include a reference that makes absolute accuracy measurements easier. Characterization of the internal surface of a worn plasma torch electrode has been realized using that technique. Surface profiling of the barrel of a gun was also performed.

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M. L. Dufour, G. Lamouche, S. Vergnole, B. Gauthier, C. Padioleau, M. Hewko, S. Lévesque, and V. Bartulovic "Surface inspection of hard to reach industrial parts using low-coherence interferometry", Proc. SPIE 6343, Photonics North 2006, 63431Z (8 September 2006); https://doi.org/10.1117/12.707806

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