Lateral resolution limit of the laser-scanning confocal vibrometer microscope

Christian Rembe

doi:10.1117/12.693073

21 June 2006 Lateral resolution limit of the laser-scanning confocal vibrometer microscope

Christian Rembe

Proceedings Volume 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; 63451E (2006) https://doi.org/10.1117/12.693073
Event: Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 2006, Ancona, Italy

Abstract

The laser-scanning confocal vibrometer microscope (CVM) for vibration measurements in microscopic structures can map out-of-plane vibrations with picometer amplitude resolution while the locus transverse and depth resolutions are in the sub-micrometer regime. This performance has been achieved by using the measurement beam of a heterodyne laser-Doppler vibrometer (LDV) as the scanned laser beam of a confocal microscope. The power of the heterodyne carrier is a measurement of the detected light intensity. Therefore, the CVM can also be used as common confocal microscope to image and measure geometries of three-dimensional structures. In this paper the general lateral resolution limits of this new microscope type are discussed and the lateral-resolution performance of a realized system is demonstrated. This system is optimized to measure out-of-plane vibrations in microelectromechanical systems (MEMS).

Citation Download Citation

Christian Rembe "Lateral resolution limit of the laser-scanning confocal vibrometer microscope", Proc. SPIE 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 63451E (21 June 2006); https://doi.org/10.1117/12.693073

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