Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Influence of electrode materials and surface roughness on the homogeneity of discharges in fluorine-based excimer laser gas mixtures

[+] Author Affiliations
D. Mathew, H. M. J. Bastiaens, K.-J. Boller, P. J. M. Peters

Univ. of Twente (Netherlands)

Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63460Q (April 26, 2007); doi:10.1117/12.738129
Text Size: A A A
From Conference Volume 6346

  • XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
  • Gmunden, Austria | September 04, 2006

abstract

The influence of electrode materials and surface roughness on the discharge homogeneity of F2 based excimer laser gas mixtures is investigated in a small x-ray preionised discharge chamber. The temporal and spatial evolution of the discharge is monitored by taking photographs of the discharge luminosity with an ICCD camera. It is found that for the same surface roughness, discharges with nickel coated aluminum electrodes are more homogeneous than the discharges using chromium or gold coated aluminum, massive copper, aluminum, brass and steel electrodes. Moreover, the surface roughness of copper electrodes does not have a large influence on the homogeneity of discharges in F2 doped excimer laser gas discharges.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

D. Mathew ; H. M. J. Bastiaens ; K.-J. Boller and P. J. M. Peters
"Influence of electrode materials and surface roughness on the homogeneity of discharges in fluorine-based excimer laser gas mixtures", Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63460Q (April 26, 2007); doi:10.1117/12.738129; http://dx.doi.org/10.1117/12.738129


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.