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Proceedings Article

Sinusoidal phase modulating interferometer base on integration method

[+] Author Affiliations
Zhongbao Xu

Hubei Industry Univ. (China) and The Key Lab. of Modern Manufacturing Quantity Engineering of Hubei Province (China)

Nan Zhang

Hubei Industry Univ. (China)

Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 635725 (October 24, 2006); doi:10.1117/12.717115
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From Conference Volume 6357

  • Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence
  • Jiancheng Fang; Zhongyu Wang
  • Beijing, China | October 13, 2006

abstract

We describe a sinusoidal phase modulating interferometer in which a CCD image sensor measure phase values, the method uses four frames obtained by integration of the time-varying intensity in an interference pattern during the four quarters of the modulation period. The optimum amplitude and phase of the sinusoidal phase modulation were determined by considering the measurement error that is resulted in the additive noise; the effect caused by the deviation from the optimum phase modulation is analyzed. Theoretical analyses and experimental verifications have shown that the distance-measurement accuracy is 2.7 nm with these techniques.

© (2006) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Zhongbao Xu and Nan Zhang
"Sinusoidal phase modulating interferometer base on integration method", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 635725 (October 24, 2006); doi:10.1117/12.717115; http://dx.doi.org/10.1117/12.717115


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