Sinusoidal phase modulating interferometer base on integration method

Zhongbao Xu; Nan Zhang

doi:10.1117/12.717115

24 October 2006 Sinusoidal phase modulating interferometer base on integration method

Zhongbao Xu, Nan Zhang

Proceedings Volume 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence; 635725 (2006) https://doi.org/10.1117/12.717115
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

We describe a sinusoidal phase modulating interferometer in which a CCD image sensor measure phase values, the method uses four frames obtained by integration of the time-varying intensity in an interference pattern during the four quarters of the modulation period. The optimum amplitude and phase of the sinusoidal phase modulation were determined by considering the measurement error that is resulted in the additive noise; the effect caused by the deviation from the optimum phase modulation is analyzed. Theoretical analyses and experimental verifications have shown that the distance-measurement accuracy is 2.7 nm with these techniques.

Citation Download Citation

Zhongbao Xu and Nan Zhang "Sinusoidal phase modulating interferometer base on integration method", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 635725 (24 October 2006); https://doi.org/10.1117/12.717115

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