Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

In-plane photonic transduction for microcantilever sensor arrays

[+] Author Affiliations
Gregory P. Nordin, Jong Wok Noh, Seunghyun Kim

Brigham Young Univ.

Proc. SPIE 6447, Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV, 64470J (February 12, 2007); doi:10.1117/12.701384
Text Size: A A A
From Conference Volume 6447

  • Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV
  • Alexander N. Cartwright; Dan V. Nicolau
  • San Jose, CA | January 20, 2007

abstract

Microcantilevers show significant promise in sensing minute quantities of chemical and biological analytes in vapor and liquid media. Much of the reported work on microcantilever sensors has made use of single functionalized microcantilevers, usually derived from commercially available atomic force microscope (AFM) cantilevers. However, arrays with hundreds to thousands of microcantilevers on a single chip are required to create sophisticated, broad spectrum chemical and biological sensors in which individual microcantilevers have different bio- or chemoselective coatings. Unfortunately, the most sensitive microcantilever readout mechanisms (such as laser beam reflection as used in atomic force microscopy) are not readily scalable to large arrays. We therefore introduce a new microcantilever transduction mechanism for silicon-on-insulator (SOI) microcantilevers that is designed to scale to large arrays while maintaining a very compact form factor and high sensitivity. This mechanism is based on in-plane photonic transduction of microcantilever deflection in which the microcantilever itself forms a single mode rib waveguide. Light from the end of the microcantilever is directed across a small gap to an asymmetric receiving waveguide with two outputs that enables differential detection of microcantilever deflection. Initial noise and optical power budget calculations indicate that deflection sensitivities in the 10's of picometer range should be achievable.

© (2007) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Gregory P. Nordin ; Jong Wok Noh and Seunghyun Kim
"In-plane photonic transduction for microcantilever sensor arrays", Proc. SPIE 6447, Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV, 64470J (February 12, 2007); doi:10.1117/12.701384; http://dx.doi.org/10.1117/12.701384


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement

 

 

 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.