Laser micromachining of optical biochips

Andrew D. Goater; Julian P. H. Burt; David J. Morris; Anoop Menachery; Nadeem H. Rizvi; Daniel R. Matthews; Huw D. Summers

doi:10.1117/12.700899

20 March 2007 Laser micromachining of optical biochips

Andrew D. Goater, Julian P. H. Burt, David J. Morris, Anoop Menachery, Nadeem H. Rizvi, Daniel R. Matthews, Huw D. Summers

Author Affiliations +

Proceedings Volume 6459, Laser-based Micro- and Nanopackaging and Assembly; 645909 (2007) https://doi.org/10.1117/12.700899
Event: Lasers and Applications in Science and Engineering, 2007, San Jose, California, United States

Abstract

Optical biochips may incorporate both optical and microfluidic components as well as integrated light emitting semiconductor devices. They make use of a wide range of materials including polymers, glasses and thin metal films which are particularly suitable if low cost devices are envisaged. Precision laser micromachining is an ideal flexible manufacturing technique for such materials with the ability to fabricate structures to sub-micron resolutions and a proven track record in manufacturing scale up. Described here is the manufacture of a range of optical biochip devices and components using laser micromachining techniques. The devices employ both microfluidics and electrokinetic processes for biological cell manipulation and characterization. Excimer laser micromachining has been used to create complex microelectrode arrays and microfluidic channels. Excimer lasers have also been employed to create on-chip optical components such as microlenses and waveguides to allow integrated vertical and edge emitting LEDs and lasers to deliver light to analysis sites within the biochips. Ultra short pulse lasers have been used to structure wafer level semiconductor light emitting devices. Both surface patterning and bulk machining of these active wafers while maintaining functionality has been demonstrated. Described here is the use of combinations of ultra short pulse and excimer lasers for the fabrication of structures to provide ring illumination of in-wafer reaction chambers. The laser micromachining processes employed in this work require minimal post-processing and so make them ideally suited to all stages of optical biochip production from development through to small and large volume production.

Citation Download Citation

Andrew D. Goater, Julian P. H. Burt, David J. Morris, Anoop Menachery, Nadeem H. Rizvi, Daniel R. Matthews, and Huw D. Summers "Laser micromachining of optical biochips", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 645909 (20 March 2007); https://doi.org/10.1117/12.700899

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available