Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror

Kumi Motai; Hiroaki Oizumi; Shinji Miyagaki; I. Nishiyama; Akira Izumi; Tomoya Ueno; Yasuo Miyazaki; Akira Namiki

doi:10.1117/12.711998

22 March 2007 Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror

Kumi Motai, Hiroaki Oizumi, Shinji Miyagaki, I. Nishiyama, Akira Izumi, Tomoya Ueno, Yasuo Miyazaki, Akira Namiki

Proceedings Volume 6517, Emerging Lithographic Technologies XI; 65170F (2007) https://doi.org/10.1117/12.711998
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Atomic hydrogen cleaning has been developed to reduce the amount of surface oxide on Ru-capped Mo/Si multilayer mirrors for EUVL. Atomic hydrogen generated by a heated W wire catalyzer was supplied to a Ru cap layer that had been lightly oxidized by ECR O2 plasma or EUV irradiation. The effectiveness of atomic hydrogen in deoxidizing it was examined by ex situ AES, XPS, and EUV absolute reflectivity measurements; and it was found that the amount of surface oxide was reduced to the initial level and that the EUV reflectivity of a multilayer degraded by oxidation recovered. In addition, the transport of atomic hydrogen thorough a winding quartz tube was demonstrated to be a promising technique. The actual density of hydrogen radicals was directly measured under various conditions so that the conditions for generating atomic hydrogen could be optimized and the required treatment time shortened.

Citation Download Citation

Kumi Motai, Hiroaki Oizumi, Shinji Miyagaki, I. Nishiyama, Akira Izumi, Tomoya Ueno, Yasuo Miyazaki, and Akira Namiki "Atomic hydrogen cleaning of Ru-capped EUV multilayer mirror", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65170F (22 March 2007); https://doi.org/10.1117/12.711998

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available