Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition

A. E. Yakshin; R. W. E. van de Kruijs; I. Nedelcu; E. Zoethout; E. Louis; F. Bijkerk; H. Enkisch; S. Müllender

doi:10.1117/12.711796

29 March 2007 Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, F. Bijkerk, H. Enkisch, S. Müllender

Proceedings Volume 6517, Emerging Lithographic Technologies XI; 65170I (2007) https://doi.org/10.1117/12.711796
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

A new deposition technique that builds on the thermal particle characteristics typical for e-beam deposition is described. This technique applies magnetron sputtering in a special scheme where these characteristics of the e-beam deposition method are achieved. The method was used for interface engineering of Mo/Si multilayers, with different barrier layer materials being tested. Composition of the barrier layers formed was studied using XPS. Results are shown on the general example of a Mo/B₄C/Si/B₄C system. The ultra-thin reflectance enhancement B₄C barriers can be deposited with low added stress, resulting in a multilayer stress as low as about -150 MPa. The best interface engineered multilayers reflect 70.5% at 13.3 nm and 70.15% at 13.5 nm. These results were achieved with 50 period multilayers terminated with a standard Si layer.

Citation Download Citation

A. E. Yakshin, R. W. E. van de Kruijs, I. Nedelcu, E. Zoethout, E. Louis, F. Bijkerk, H. Enkisch, and S. Müllender "Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65170I (29 March 2007); https://doi.org/10.1117/12.711796

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available