A MEMS vibration sensor based on Mach Zehnder interferometers

Tianwei Ma; Wenbin Zhao; Jiamin Liu

doi:10.1117/12.715780

18 April 2007 A MEMS vibration sensor based on Mach Zehnder interferometers

Tianwei Ma, Wenbin Zhao, Jiamin Liu

Proceedings Volume 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007; 65292C (2007) https://doi.org/10.1117/12.715780
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2007, San Diego, California, United States

Abstract

Two micro-optomechanical accelerometers based on Multi-Mode Interference (MMI) couplers were designed and evaluated in this study. The optical components were optimized with the Parameter Scan Method. According to the photoelastic effect, the change in refractive index of a waveguide made of crystal materials is related to the mechanical strains in the waveguide. In this study, such change was calculated using the mechanical strains obtained from the Finite Element Analysis (FEA) results. Beam Propagation Method (BPM) was used to study the relationship between the input acceleration and the output optical power and thus the performance of the proposed accelerometers. The results show the two designs are suitable for different acceleration ranges.

Citation Download Citation

Tianwei Ma, Wenbin Zhao, and Jiamin Liu "A MEMS vibration sensor based on Mach Zehnder interferometers", Proc. SPIE 6529, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007, 65292C (18 April 2007); https://doi.org/10.1117/12.715780

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