Paper
26 April 2007 Micromachined microfluidic chemiluminescent system for explosives detection
Yoon Park, Dean P. Neikirk, Eric V. Anslyn
Author Affiliations +
Abstract
Results will be reported from efforts to develop a self-contained micromachined microfluidic detection system for the presence of specific target analytes under the US Office of Naval Research Counter IED Basic Research Program. Our efforts include improving/optimizing a dedicated micromachined sensor array with integrated photodetectors and the synthesis of chemiluminescent receptors for nitramine residues. Our strategy for developing chemiluminescent synthetic receptors is to use quenched peroxyoxalate chemiluminescence; the presence of the target analyte would then trigger chemiluminescence. Preliminary results are encouraging as we have been able to measure large photo-currents from the reaction. We have also fabricated and demonstrated the feasibility of integrating photodiodes within an array of micromachined silicon pyramidal cavities. One particular advantage of such approach over a conventional planar photodiode would be its collection efficiency without the use of external optical components. Unlike the case of a normal photodetector coupled to a focused or collimated light source, the photodetector for such a purpose must couple to an emitting source that is approximately hemispherical; hence, using the full sidewalls of the bead's confining cavity as the detector allows the entire structure to act as its own integrating sphere. At the present time, our efforts are concentrating on improving the signal-to-noise ratio by reducing the leakage current by optimizing the fabrication sequence and the design.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoon Park, Dean P. Neikirk, and Eric V. Anslyn "Micromachined microfluidic chemiluminescent system for explosives detection", Proc. SPIE 6554, Chemical and Biological Sensing VIII, 655403 (26 April 2007); https://doi.org/10.1117/12.719830
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KEYWORDS
Silicon

Photodiodes

Etching

Diodes

Microfluidics

Photodetectors

Semiconducting wafers

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