Surface metrology with a stitching Shack-Hartmann profilometric head

J. Floriot; X. Levecq; S. Bucourt; M. Thomasset; F. Polack; M. Idir; P. Mercère; S. Brochet; T. Moreno

doi:10.1117/12.726058

18 June 2007 Surface metrology with a stitching Shack-Hartmann profilometric head

J. Floriot, X. Levecq, S. Bucourt, M. Thomasset, F. Polack, M. Idir, P. Mercère, S. Brochet, T. Moreno

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66162A (2007) https://doi.org/10.1117/12.726058
Event: Optical Metrology, 2007, Munich, Germany

Abstract

In this article, a stitching Shack-Hartmann profilometric head is presented. This instrument has been developed to answer improved needs for surface metrology in the domain of short-wavelength optics (X/EUV). It is composed of a highaccuracy Shack-Hartmann wavefront sensor and an illumination platform. This profilometric head is mounted on a translation stage to perform bidimensional mappings by stitching together successive sub-aperture acquisitions. This method ensures the submicroradian accuracy of the system and allows the user to measure large surfaces with a submillimetric spatial resolution. We particularly emphasize on the calibration method of the head; this method is validated by characterizing a super-flat reference mirror. Cross-checked tests with the Soleil's long-trace profiler are also performed. The high precision of profilometric head has been validated with the characterization of a spherical mirror. We also emphasize on the large curvature dynamic range of the instrument with the measurement of an X-ray toric mirror. The instrument, which performs a complete diagnostic of the surface or wavefront under test, finds its main applications in metrology (measurement of large optics/wafers, post-polishing control and local surface finishing for the industry, spatial quality control of laser beam).

Citation Download Citation

J. Floriot, X. Levecq, S. Bucourt, M. Thomasset, F. Polack, M. Idir, P. Mercère, S. Brochet, and T. Moreno "Surface metrology with a stitching Shack-Hartmann profilometric head", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66162A (18 June 2007); https://doi.org/10.1117/12.726058

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